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Aspect Ratio Dependent Scalloping Attenuation in Drie and an Application to Low-Loss Fiber-Optical Switches
Y. Mita,M. Sugiyama,M. Kubota,F. Marty,T. Bourouina,T. Shibata
Published 2006 in 19th IEEE International Conference on Micro Electro Mechanical Systems
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- Publication year
2006
- Venue
19th IEEE International Conference on Micro Electro Mechanical Systems
- Publication date
2006-05-08
- Fields of study
Materials Science, Physics, Engineering
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