Aspect Ratio Dependent Scalloping Attenuation in Drie and an Application to Low-Loss Fiber-Optical Switches

Y. Mita,M. Sugiyama,M. Kubota,F. Marty,T. Bourouina,T. Shibata

Published 2006 in 19th IEEE International Conference on Micro Electro Mechanical Systems

ABSTRACT

No abstract is available for this paper.

PUBLICATION RECORD

  • Publication year

    2006

  • Venue

    19th IEEE International Conference on Micro Electro Mechanical Systems

  • Publication date

    2006-05-08

  • Fields of study

    Materials Science, Physics, Engineering

  • Identifiers
  • External record

    Open on Semantic Scholar

  • Source metadata

    Semantic Scholar

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