Structural and dielectric study of parylene C thin films

No abstract is available for this paper.

• Publication year

  2009

• Venue

  Applied Physics Letters

• Publication date

  2009-04-14

• Fields of study

  Materials Science, Physics

• Identifiers
  DOI 10.1063/1.3114404
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

• Preparation and properties of thin parylene layers as the gate dielectrics for organic field effect transistors

  2009cited by this paper
• Control of interfaces on electrical properties of SiO(2)-Parylene-C laminar composite dielectrics.

  2009cited by this paper
• Flexible pentacene ion sensitive field effect transistor with a hydrogenated silicon nitride surface treated Parylene top gate insulator

  2008cited by this paper
• Electrical actuation of electrically conducting and insulating droplets using ac and dc voltages

  2008cited by this paper
• Impact of semiconductor/contact metal thickness ratio on organic thin-film transistor performance

  2008cited by this paper
• Anodic Ta2O5 for CMOS compatible low voltage electrowetting-on-dielectric device fabrication

  2007cited by this paper
• Dielectric low-k composite films based on PMMA, PVC and methylsiloxane-silica: Synthesis, characterization and electrical properties

  2007cited by this paper
• Control of Parameters Influencing the Thermal Imprint of Parylene/Silicon

  2007cited by this paper
• Photoinduced phospholipid polymer grafting on Parylene film: advanced lubrication and antibiofouling properties.

  2007cited by this paper
• Influence of the polymer dielectric characteristics on the performance of a quaterthiophene organic field-effect transistor

  2006cited by this paper
• Electrowetting: from basics to applications

  2005cited by this paper
• Chemical Vapor Deposition Polymerization

  2004cited by this paper
• Chemical Vapor Deposition Polymerization: The Growth and Properties of Parylene Thin Films

  2003cited by this paper
• Engineering the surface and interface of Parylene C coatings by low-temperature plasmas

  2001cited by this paper
• Low dielectric constant polymers for microelectronics

  2001cited by this paper
• Permittivity of polyethylene and polyethyleneterephtalate

  2000cited by this paper
• Temperature studies of optical birefringence and X-ray diffraction with poly(p-xylylene), poly(chloro-p-xylylene) and poly(tetrafluoro-p-xylylene) CVD thin films

  2000cited by this paper
• Variable focal lens controlled by an external voltage: An application of electrowetting

  2000cited by this paper
• Stochastic dynamics of polymer brushes under shear deformation

  1998cited by this paper
• Dielectric spectroscopy of polymeric materials : fundamentals and applications

  1997cited by this paper
• Encyclopedia of Polymer Science and Technology

  1970cited by this paper

• Ultralow and Tunable Thermal Conductivity of Parylene C for Thermal Insulation in Advanced Packaging

  2026cites this paper
• Investigation of the Dielectric and Electrical Properties of Poly(chloro‐p‐xylylene) (Parylene‐C) Layers for Controlling Charge Transport in Organic Field‐Effect Transistors

  2025cites this paper
• Excellent high-temperature energy storage performance of polymer dielectrics through the synergistic action of conjugation effect inhibition and dipole modulation

  2025cites this paper
• Performance optimization of ZnO Nanowire/Parylene-C composite-based Piezoelectric Nanogenerators

  2024influential citation
• Frequency Dependent Negative Dielectric Behavior in Parylene C Based Composite Films

  2024cites this paper
• New coating with superior corrosion and wear performances: Parylene C/CrN duplex coating

  2023cites this paper
• Low Temperature Processed Flexible Organic Photodetectors with High Spectral Detectivity

  2023cites this paper
• Simple and practical methods for utilizing parylene C film based on vertical deposition and laser patterning

  2022cites this paper
• Vitamin C-reduced graphene oxide improves the performance and stability of multimodal neural microelectrodes

  2022cites this paper
• Investigation on Parylene-C based neural electrodes by accelerated life test and reliability improvement using polyimide flexible cable

  2022cites this paper
• Influence of ring electrodes covered with dielectric layer on the characteristics of atmospheric pressure plasma jet and its interaction with polymer surface

  2022cites this paper
• Long-term thermal aging of parylene conformal coating under high humidity and its effects on tin whisker mitigation

  2021cites this paper
• In-memory computing with emerging nonvolatile memory devices

  2021cites this paper
• A new addition thermosetting resin from phthalonitrile functionalized [2.2]paracyclophane

  2021cites this paper
• Effect of Surface-Modification on In Vitro Corrosion of Biodegradable Magnesium-Based Helical Stent Fabricated by Photo-chemical Etching

  2020cites this paper
• Poly(p-Xylylene) and Poly(chloro-p-Xylylene) Protective Coatings Prepared by Deposition in a Nitrogen Flow

  2020cites this paper
• Outstanding performance of parylene polymers as electrets for energy harvesting and high‐temperature applications

  2020cites this paper
• Effect of the Dielectric and Mechanical Properties of the Polymer Matrix on ZnO‐Nanowire‐Based Composite Nanogenerators Performance

  2020cites this paper
• Novel concept of a low-power high-volume microfluidic actuator: theory of operation and experimental characterization

  2019cites this paper
• Nanocomposite–parylene C thin films with high dielectric constant and low losses for future organic electronic devices

  2019cites this paper
• Responsive, 3D Electronics Enabled by Liquid Crystal Elastomer Substrates.

  2019cites this paper
• Increasing surface charge density by effective charge accumulation layer inclusion for high-performance triboelectric nanogenerators

  2019cites this paper
• Parylene copolymer gate dielectrics for organic field-effect transistors

  2019cites this paper
• Highly stable flexible organic field-effect transistors with Parylene-C gate dielectrics on a flexible substrate

  2019cites this paper
• A parylene coating system specifically designed for producing ultra-thin films for nanoscale device applications.

  2019cites this paper
• In Vitro and In Vivo Testing of Zinc as a Biodegradable Material for Stents Fabricated by Photo-Chemical Etching

  2019cites this paper
• Stretchable interconnects for smart integration of sensors in wearable and robotic applications

  2018cites this paper
• Effect of parylene C coating on the antibiocorrosive and mechanical properties of different magnesium alloys

  2018cites this paper
• A Spectroscopy and Microscopy Study of Parylene-C OFETs for Explosive Sensing

  2018cites this paper
• Examining epitaxial graphene surface conductivity and quantum Hall device stability with Parylene passivation.

  2018cites this paper
• Characteristics and Temperature Compensation of Non-Dispersive Infrared (NDIR) Alcohol Gas Sensors According to Incident Light Intensity

  2018cites this paper
• Interfacing Digital Microfluidics with Ambient Mass Spectrometry Using SU-8 as Dielectric Layer

  2018cites this paper
• Annealing for the improvement of the capabilities of parylene C as electret

  2018cites this paper
• Polymerization of chloro-p-xylylenes, quantum-chemical study

  2017cites this paper
• Superconducting Through-Silicon Vias for Quantum Integrated Circuits

  2017cites this paper
• Système d'encapsulation multicouche pour la gradation de potentiel dans les modules de puissance : apport des matériaux nanocomposites à conductivité contrôlée

  2017cites this paper
• Two-liquid wetting properties as a surface polarity probe for hydrophobic coatings.

  2017cites this paper
• Space Environment Effects on Flexible, Low-Voltage Organic Thin-Film Transistors.

  2017cites this paper
• Polarization mechanisms of dielectric materials at a binary liquid interface: impacts on electrowetting actuation.

  2017cites this paper
• Flexible bottom-gate graphene transistors on Parylene C substrate and the effect of current annealing.

  2016cites this paper
• A Digital Microfluidics Platform for Loop-Mediated Isothermal Amplification of DNA

  2016cites this paper
• Dielectric Investigation of Parylene D Thin Films: Relaxation and Conduction Mechanisms.

  2015cites this paper
• SYNTHESIS OF FUNCTIONALIZED [2.2] PARACYCLOPHANE PRECURSORS FOR FUNCTIONAL POLY(PARA-XYLYLENE) THIN FILM DEPOSITION

  2015cites this paper
• Terahertz Electrodynamics of Dirac Fermions in Graphene

  2015cites this paper
• Dielectric and thermal properties of parylene N and D films for power electronic surface insulation

  2015cites this paper
• Evaluation of activation parameters of molecular mobility of parylene C using differential scanning calorimetry, dielectric spectroscopy, and thermally stimulated depolarization currents.

  2014cites this paper
• Lifetime assessment of atomic-layer-deposited Al2O3-Parylene C bilayer coating for neural interfaces using accelerated age testing and electrochemical characterization.

  2014cites this paper
• Formation of three-dimensional Parylene C structures via thermoforming

  2014cites this paper
• Parylene C Aging Studies

  2014cites this paper
• Characterization and Modeling of Conductive and Insulating Coatings for Neural Interfaces

  2013cites this paper
• Effects of deposition temperature on Parylene-C properties

  2013cites this paper
• Performance improvements of the hydrophobic and the dielectric properties of parylene C

  2013cites this paper
• Etude du procédé de réalisation de micro-antennes souples implantables pour l’Imagerie médicale par Résonance Magnétique

  2012cites this paper
• Effect of O2, Ar/H2 and CF4 plasma treatments on the structural and dielectric properties of parylene-C thin films

  2012cites this paper
• Effect of film thickness on structural, morphology, dielectric and electrical properties of parylene C films

  2012cites this paper
• Effect of ClH aromatic substitution on structural and dielectric properties of poly(p-xylylene)

  2012cites this paper
• Functional Thin Films Resulting from Parylene–Vinyl Copolymerization

  2012cites this paper
• Experimental and theoretical study of AC electrical conduction mechanisms of semicrystalline parylene C thin films.

  2012cites this paper
• Metal salts reduction during parylenes polymerization

  2012cites this paper
• Dielectric properties of parylene AF4 as low-k material for microelectronic applications

  2012cites this paper
• Ultra-low voltage, organic thin film transistors fabricated on plastic substrates by a highly reproducible process

  2012cites this paper
• Influence of crystallization-induced amorphous phase confinement on α- and β-relaxation molecular mobility in parylene F

  2011cites this paper
• Reliable and Low-Voltage Electrowetting on Thin Parylene Films

  2011cites this paper
• Molecular dynamics simulations of the growth of poly(chloro-para-xylylene) films

  2011cites this paper
• Ac-conductivity and dielectric relaxations above glass transition temperature for parylene-C thin films

  2011cites this paper
• I–t, J–1/T and J–E characteristics for the understanding of the main mechanism of electric conduction and the determination of the glass transition temperature of parylene C thin films

  2011cites this paper
• Atomistic modeling of parylene-metal interactions for surface micro-structuring

  2011cites this paper
• Étude des matériaux isolants d'encapsulation pour la montée en température des modules de puissance haute tension

  2011cites this paper
• Scaling down of amorphous indium gallium zinc oxide thin film transistors on the polyethersulfone substrate employing the protection layer of parylene-C for the large-scale integration

  2010cites this paper