Miniaturization of a grating-based SPR type near-infrared spectrometer by using vibration of a MEMS cantilever

No abstract is available for this paper.

• Publication year

  2018

• Venue

  IEEE/LEOS International Conference on Optical MEMS

• Publication date

  Unknown publication date

• Fields of study

  Materials Science, Physics, Engineering

• Identifiers
  DOI 10.1109/MEMSYS.2018.8346648
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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