Low-impedance shielded tip piezoresistive probe enables portable Microwave Impedance Microscopy

No abstract is available for this paper.

• Publication year

  2012

• Venue

  IEEE/LEOS International Conference on Optical MEMS

• Publication date

  2012-03-15

• Fields of study

  Materials Science, Physics, Engineering

• Identifiers
  DOI 10.1109/MEMSYS.2012.6170145
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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