A CMOS Micromachined Capacitive Tactile Sensor With Integrated Readout Circuits and Compensation of Process Variations

No abstract is available for this paper.

• Publication year

  2014

• Venue

  IEEE Transactions on Biomedical Circuits and Systems

• Publication date

  2014-10-09

• Fields of study

  Medicine, Materials Science, Computer Science, Engineering

• Identifiers
  DOI 10.1109/TBCAS.2014.2358563PMID 25314707
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar, PubMed

• No claims are published for this paper.

• No concepts are published for this paper.

• Integration of Force Reflection with Tactile Sensing for Minimally Invasive Robotics-Assisted Tumor Localization

  2013cited by this paper
• A grasping forceps with a triaxial MEMS tactile sensor for quantification of stresses on organs

  2013cited by this paper
• A hydrogel-based intravascular microgripper manipulated using magnetic fields

  2013cited by this paper
• MRI driven magnetic microswimmers

  2012cited by this paper
• A CMOS Micromachined Capacitive Sensor Array for Fingerprint Detection

  2012cited by this paper
• Dielectrophoresis-Based Integrated Lab-on-Chip for Nano and Micro-Particles Manipulation and Capacitive Detection

  2012cited by this paper
• A review of tactile sensing technologies with applications in biomedical engineering

  2012cited by this paper
• Magnetic Helical Micromachines: Fabrication, Controlled Swimming, and Cargo Transport

  2012cited by this paper
• Tactile Sensing for Mobile Manipulation

  2011cited by this paper
• Development of a CMOS-Based Capacitive Tactile Sensor With Adjustable Sensing Range and Sensitivity Using Polymer Fill-In

  2011cited by this paper
• On-Body Inertial Sensing and Signal Processing for Clinical Assessment of Tremor

  2009cited by this paper
• A Compact and Low-Cost MEMS Loudspeaker for Digital Hearing Aids

  2009cited by this paper
• A Wireless and Batteryless 10-Bit Implantable Blood Pressure Sensing Microsystem With Adaptive RF Powering for Real-Time Laboratory Mice Monitoring

  2009cited by this paper
• Tuning the sensing range and sensitivity of three axes tactile sensors using the polymer composite membrane

  2008cited by this paper
• A Hybrid Microfluidic/CMOS Capacitive Sensor Dedicated to Lab-on-Chip Applications

  2007cited by this paper
• A Full Fingerprint Verification System for a Single-Line Sweep Sensor

  2007cited by this paper
• CMOS-Based Tactile Microsensor for Medical Instrumentation

  2007cited by this paper
• Low cost thin film based piezoresistive MEMS tactile sensor

  2007cited by this paper
• Novel surface structure and its fabrication process for MEMS fingerprint sensor

  2005cited by this paper
• Active tactile sensor for detecting contact force and hardness of an object

  2003cited by this paper
• Circuit techniques for reducing the effects of op-amp imperfections: autozeroing, correlated double sampling, and chopper stabilization

  1996cited by this paper
• Silicon Three-axial Tactile Sensor

  1995cited by this paper

• Machine learning-driven metastructure design for sensor-free linearization of MEMS electrothermal actuators

  2025cites this paper
• A CMOS-MEMS Pressure Sensor with Integrated Front-End for Chemical Vapor Deposition Systems

  2023cites this paper
• An ASIC for Gripper Finger Haptic Force Feedback in Minimally Invasive Surgery

  2023cites this paper
• A 53.36pF/MPA CMOS-MEMS Pressure Sensor with Compact Size and Integrated Digital Readout

  2020cites this paper
• Cardiology

  2020cites this paper
• Nanoscale Technologies for Prevention and Treatment of Heart Failure: Challenges and Opportunities.

  2019cites this paper
• Ultra-Low Power Application-Specific Integrated Circuits for Sensing

  2018cites this paper
• Future of Smart Cardiovascular Implants

  2018cites this paper
• Basic readout circuit applied on FGMOS-based CMOS-MEMS inertial sensing prototypes

  2017cites this paper
• Achievements and Open Issues Toward Embedding Tactile Sensing and Interpretation into Electronic Skin Systems

  2017cites this paper
• A Novel Wearable Apparatus to Measure Fingertip Forces in Manipulation Tasks Based on MEMS Barometric Sensors

  2017cites this paper
• CMOS MEMS Fabrication Technologies and Devices

  2016cites this paper
• A high-sensitivity tactile sensor based on piezoelectric polymer PVDF coupled to an ultra-low voltage organic transistor

  2016cites this paper
• From Wearable Sensors to Smart Implants-–Toward Pervasive and Personalized Healthcare

  2015cites this paper