Trapezoidal SiNWs array fabricated by AFM-LAO for Dengue virus DNA oligomer detection

This paper demonstrates an array of SiNWs device was fabricated by Atomic Force Microscope-Local Anodic Oxidation (AFM-LAO) technique for Dengue virus deoxyribonucleic acid (DNA) oligomer detection. The SiNWs were wet etched by using 25 wt% tetramethylammonium hydroxide (TMAH) with addition of isopropyl alcohol (IPA) at various concentrations (10, 20 and 30 vol%). The produced SiNWs were in trapezoidal shape with different dimension and surface roughness. The surface of SiNWs was modified with 3-aminopropyltriethoxysilane and glutaraldehyde followed by the immobilized peptide nucleic acid, then hybridized with Dengue DNA oligomer. The hybridization procedure causes a current change due to accumulation of negative charges introduced on SiNWs surface which determines the performance of the device. The small width and rough surface of SiNWs device has high sensitivity (80.3 μAM−1) and low detection limit (2.22 fM).

• Publication year

  2019

• Venue

  Materials Research Express

• Publication date

  2019-09-25

• Fields of study

  Materials Science, Physics, Engineering

• Identifiers
  DOI 10.1088/2053-1591/ab3571
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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