Design of an atomic layer deposition reactor for hydrogen sulfide compatibility.

No abstract is available for this paper.

• Publication year

  2010

• Venue

  Review of Scientific Instruments

• Publication date

  2010-04-14

• Fields of study

  Medicine, Materials Science, Chemistry, Engineering

• Identifiers
  DOI 10.1063/1.3384349PMID 20441356
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar, PubMed

• No claims are published for this paper.

• No concepts are published for this paper.

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