Physics-Informed Neural Network-Based Prediction of V/G Value in Czochralski Silicon Single Crystal Growth Process

No abstract is available for this paper.

• Publication year

  2025

• Venue

  Youth Academic Annual Conference of Chinese Association of Automation

• Publication date

  2025-05-17

• Fields of study

  Not labeled

• Identifiers
  DOI 10.1109/YAC66630.2025.11149781
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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