Miniaturized Foldable Electrodes with Direct CMOS Integration for Implantable Applications

This study demonstrates the feasibility of directly integrating foldable microelectrodes (starting from $250 \mu \mathrm{~m}$ width and $1600 \mu \mathrm{~m}$ length) with CMOS front-end for implantable biomedical applications. Mechanical robustness was evaluated through Finite Element Method (FEM) simulations and validated by implantation into an agarose phantom, showing no structural failure. Electrical performance was assessed using Electrochemical Impedance Spectroscopy (EIS) measurement, with results in agreement with values reported in the literature, confirming the integrity of the microfabrication process. Additionally, an electrochemical sensing front-end was also designed, consisting of a full-custom digital potentiostat to illustrate functional capability. This study presents a complete and reproducible microfabrication workflow, providing a promising foundation for future development of highly integrated, minimally invasive bioelectronic interfaces.

• Publication year

  2025

• Venue

  Biomedical Circuits and Systems Conference

• Publication date

  2025-10-16

• Fields of study

  Not labeled

• Identifiers
  DOI 10.1109/BioCAS67066.2025.00084
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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