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A Virtual Metrology System for Predicting End-of-Line Electrical Properties Using a MANCOVA Model With Tools Clustering
Tian-Hong Pan,Biqi Sheng,D. Wong,Shi-Shang Jang
Published 2011 in IEEE Transactions on Industrial Informatics
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- Publication year
2011
- Venue
IEEE Transactions on Industrial Informatics
- Publication date
2011-01-20
- Fields of study
Computer Science, Engineering
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