A bubble-powered micro-rotor: conception, manufacturing, assembly and characterization

A steady fluid flow, called microstreaming, can be generated in the vicinity of a micro-bubble excited by ultrasound. In this paper, we use this phenomenon to assemble and power a microfabricated rotor at rotation speeds as high as 625 rpm. The extractible power is estimated to be of the order of a few femtowatts. A first series of experiments with uncontrolled rotor shapes is presented, demonstrating the possibility of this novel actuation scheme. A second series of experiments with 65 µm rotors micromanufactured in SU-8 resin is then presented. Variables controlling the rotation speed and rotor stability are investigated, such as the bubble diameter, the acoustic excitation frequency and amplitude and the rotor geometry. Finally, an outlook is provided on developing this micro-rotor into a MEMS-based motor capable of delivering tunable, infinitesimal rotary power at the microscale.

• Publication year

  2007

• Venue

  Journal of Micromechanics and Microengineering

• Publication date

  2007-10-31

• Fields of study

  Materials Science, Physics, Engineering

• Identifiers
  DOI 10.1088/0960-1317/17/12/010arXiv 0912.3035
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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