Segmental Semi-Markov Models for Endpoint Detection in Plasma Etching

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• Publication year

  2000

• Venue

  Unknown venue

• Publication date

  Unknown publication date

• Fields of study

  Physics, Computer Science, Engineering

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  No identifiers available.

• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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