MEMS Based Integrated Particle Detection Chip for Real Time Environmental Monitoring

No abstract is available for this paper.

• Publication year

  2006

• Venue

  19th IEEE International Conference on Micro Electro Mechanical Systems

• Publication date

  2006-05-08

• Fields of study

  Materials Science, Engineering, Environmental Science

• Identifiers
  DOI 10.1109/MEMSYS.2006.1627736
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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