Microthermoforming of nanostructured polymer films: a new bonding method for the integration of nanostructures in 3-dimensional cavities

No abstract is available for this paper.

• Publication year

  2009

• Venue

  Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

• Publication date

  2009-04-01

• Fields of study

  Materials Science, Engineering

• Identifiers
  DOI 10.1007/S00542-010-1072-2
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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