Variable cross-section nanopores fabricated in silicon nitride membranes using a transmission electron microscope

No abstract is available for this paper.

• Publication year

  2012

• Venue

  Journal of Micromechanics and Microengineering

• Publication date

  2012-06-01

• Fields of study

  Materials Science, Physics, Engineering

• Identifiers
  DOI 10.1088/0960-1317/22/6/067002
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

• Download details: IP Address: 129.25.34.16

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