The coming of age of the first hybrid metrology software platform dedicated to nanotechnologies (Conference Presentation)

No abstract is available for this paper.

• Publication year

  2017

• Venue

  Advanced Lithography

• Publication date

  2017-04-28

• Fields of study

  Materials Science, Computer Science, Engineering

• Identifiers
  DOI 10.1117/12.2258093
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

• No references are available for this paper.

• New insights on physicochemical features and toxicological outcome provided from incineration of nanocomposites

  2025cites this paper
• Stability and dispersibility of microplastics in experimental exposure medium and their dimensional characterization by SMLS, SAXS, Raman microscopy, and SEM.

  2024cites this paper
• Parametric modeling of patterned object with variations and expert tuning of edge placement

  2021cites this paper
• Dimensional measurement of TiO2 (Nano) particles by SAXS and SEM in powder form.

  2021cites this paper
• Machine Learning assistant technology to facilitate Fin and 3D memory measurements on SEM and TEM images

  2020cites this paper
• Using machine learning technology to accelerate the development of plasma etching processes

  2019cites this paper
• Accelerate the analysis and optimization of lamellar BCP process using machine learning

  2019cites this paper