Integrated optical dual-cantilever arrays in silica on silicon.

A dual cantilever device has been demonstrated which can operate as a force sensor or variable attenuator. The device is fabricated using physical micromachining techniques that do not require cleanroom class facilities. The response of the device to mechanical actuation is measured, and shown to be well described by conventional fiber optic angular misalignment theory. The device has the potential to be utilized within integrated optical components for sensors or attenuators. An array of devices was fabricated with potential for parallel operation.

• Publication year

  2014

• Venue

  Optics Express

• Publication date

  2014-12-29

• Fields of study

  Materials Science, Medicine, Physics, Engineering

• Identifiers
  DOI 10.1364/OE.22.031801PMID 25607148
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar, PubMed

• No claims are published for this paper.

• No concepts are published for this paper.

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