A SIMULATION-BASED APPROACH FOR AN EFFECTIVE AMHS DESIGN IN A LEGACY SEMICONDUCTOR MANUFACTURING FACILITY

No abstract is available for this paper.

• Publication year

  2017

• Venue

  Online World Conference on Soft Computing in Industrial Applications

• Publication date

  2017-12-03

• Fields of study

  Computer Science, Engineering

• Identifiers
  DOI 10.1109/WSC.2017.8248073
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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