Microscopic underpinnings of defect nucleation and growth in silicon crystal growth and wafer processing

No abstract is available for this paper.

• Publication year

  2009

• Venue

  Materials Science and Engineering B-advanced Functional Solid-state Materials

• Publication date

  2009-03-15

• Fields of study

  Materials Science, Physics, Engineering

• Identifiers
  DOI 10.1016/J.MSEB.2008.12.040
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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