Treatment of organic wastewater discharged from semiconductor manufacturing process by ultraviolet/hydrogen peroxide and biodegradation

No abstract is available for this paper.

• Publication year

  2002

• Venue

  IEEE Transactions on Semiconductor Manufacturing

• Publication date

  2002-11-01

• Fields of study

  Materials Science, Chemistry, Engineering, Environmental Science

• Identifiers
  DOI 10.1109/TSM.2002.804903
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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