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Low-Temperature Growth of ZnO Thin Films by Linear Source Ultrasonic Spray Chemical Vapor Deposition
Hiroyuki Nishinaka,T. Kawaharamura,S. Fujita
Published 2007 in Japanese Journal of Applied Physics
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- Publication year
2007
- Venue
Japanese Journal of Applied Physics
- Publication date
2007-10-09
- Fields of study
Chemistry, Materials Science, Physics, Engineering
- Identifiers
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Semantic Scholar
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