{"corpus_id":33282301,"paper_sha":"437a466e0490babdb864612f3185eeca52ebda8b","doi":"10.1364/OE.21.019029","arxiv_id":null,"pmid":23938818,"pmcid":null,"mag_id":2068268178,"dblp_id":null,"acl_id":null,"title":"Silicon photonic slot waveguide Bragg gratings and resonators.","year":2013,"publication_date":"2013-08-12","venue":"Optics Express","journal":{"name":"Optics express","pages":"\n          19029-39\n        ","volume":"21 16"},"journal_issn":null,"journal_title":null,"publication_types":["JournalArticle"],"pubmed_pub_types":["Journal Article","Research Support, U.S. Gov't, Non-P.H.S."],"s2_fields_of_study":["Materials Science","Physics","Medicine","Engineering"],"reference_count":37,"citation_count":73,"influential_citation_count":0,"is_open_access":false,"arxiv_categories":null,"arxiv_license":null,"arxiv_journal_ref":null,"mesh_headings":null,"chemicals":null,"comments_corrections":null,"source_flags":5,"s2_open_access_pdf_url":null,"s2_open_access_landing_url":null,"s2_open_access_license":null,"s2_open_access_status":null,"pmc_open_access_pdf_url":null,"pmc_open_access_landing_url":null,"pmc_open_access_license":null,"pmc_open_access_status":null,"unpaywall_open_access_pdf_url":null,"unpaywall_open_access_landing_url":null,"unpaywall_open_access_license":null,"unpaywall_open_access_status":null,"abstract":"We present the design, fabrication, and characterization of integrated Bragg gratings in silicon-on-insulator slot waveguides. The Bragg gratings are formed with sidewall corrugations, either on the inside or on the outside of the waveguide. We demonstrate resonators implemented using phase-shifted Bragg gratings in slot waveguides, showing quality factors up to 3 × 10(4). Due to the strong optical confinement in the slot, these devices are promising for optical sensing applications. The devices were fabricated using a CMOS-compatible process, facilitating high-volume and low-cost production.","claims":[{"public_id":"cl_a6fb92d9971eb1526e9592f841f88442","status":"active","text":"Bragg gratings were formed with sidewall corrugations on either the inside or the outside of the waveguide.","confidence":0.96,"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/claims/cl_a6fb92d9971eb1526e9592f841f88442"},{"public_id":"cl_5bb65fb99a1fc800249c3b8c09d8a943","status":"active","text":"Integrated Bragg gratings were designed, fabricated, and characterized in silicon-on-insulator slot waveguides.","confidence":0.98,"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/claims/cl_5bb65fb99a1fc800249c3b8c09d8a943"},{"public_id":"cl_59dac29316f926e4337f51b2657a2694","status":"active","text":"Phase-shifted Bragg gratings in slot waveguides were used to implement resonators with quality factors up to 3 × 10^4.","confidence":0.99,"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/claims/cl_59dac29316f926e4337f51b2657a2694"},{"public_id":"cl_c711f1072838ecbf91935e4ef316bc6d","status":"active","text":"The devices are promising for optical sensing applications because the slot provides strong optical confinement.","confidence":0.91,"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/claims/cl_c711f1072838ecbf91935e4ef316bc6d"},{"public_id":"cl_d9fbcb68461c8b125b776a079d9f1c31","status":"active","text":"The devices were fabricated using a CMOS-compatible process, supporting high-volume and low-cost production.","confidence":0.95,"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/claims/cl_d9fbcb68461c8b125b776a079d9f1c31"}],"concepts":[{"public_id":"co_0a484339e5c63e231c379f3de0ae69c2","status":"active","name":"optical sensing applications","description":"Uses of photonic devices to detect changes in optical properties caused by analytes or environmental variation.","types":["application"],"aliases":[],"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/concepts/co_0a484339e5c63e231c379f3de0ae69c2"},{"public_id":"co_0be69d8b1a3d73d9c712b88cbe48483e","status":"active","name":"slot waveguides","description":"Waveguides that confine an optical field in a narrow low-index slot between higher-index regions.","types":["waveguide"],"aliases":[],"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/concepts/co_0be69d8b1a3d73d9c712b88cbe48483e"},{"public_id":"co_35aa18237379b7de8e4c1c252d5fc60c","status":"active","name":"Bragg gratings","description":"Periodic refractive-index or structural modulations that reflect selected optical wavelengths.","types":["photonic structure"],"aliases":[],"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/concepts/co_35aa18237379b7de8e4c1c252d5fc60c"},{"public_id":"co_658f175dab0e66811f1c3aecfd1a1dc2","status":"active","name":"resonators","description":"Optical devices that trap light at resonant wavelengths to enhance field buildup.","types":["device"],"aliases":[],"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/concepts/co_658f175dab0e66811f1c3aecfd1a1dc2"},{"public_id":"co_6d367d450d082c962db4fe53503f0bd0","status":"active","name":"quality factors","description":"A measure of how narrow and low-loss a resonance is in an optical device.","types":["performance metric"],"aliases":["Q factors","Q"],"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/concepts/co_6d367d450d082c962db4fe53503f0bd0"},{"public_id":"co_7714e7d4d457dad01d909ac1065f980a","status":"active","name":"phase-shifted Bragg gratings","description":"Bragg gratings that include a phase discontinuity to create a resonant cavity mode.","types":["photonic structure"],"aliases":[],"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/concepts/co_7714e7d4d457dad01d909ac1065f980a"},{"public_id":"co_77765a71e5b9135d9d35bb325be0d692","status":"active","name":"strong optical confinement","description":"A mode confinement effect in which light is tightly concentrated in a small waveguide region.","types":["property"],"aliases":[],"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/concepts/co_77765a71e5b9135d9d35bb325be0d692"},{"public_id":"co_b010538cb30bcb0b296da1712f90712c","status":"active","name":"integrated Bragg gratings","description":"Bragg grating structures implemented as part of an integrated photonic circuit.","types":["device"],"aliases":[],"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/concepts/co_b010538cb30bcb0b296da1712f90712c"},{"public_id":"co_bb670997a630703d2a420f6056153021","status":"active","name":"sidewall corrugations","description":"Periodic variations along the sidewalls of a waveguide used to create optical scattering or reflection.","types":["structural feature"],"aliases":[],"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/concepts/co_bb670997a630703d2a420f6056153021"},{"public_id":"co_bba85738cab803a57d1ea436d5ad8416","status":"active","name":"silicon-on-insulator slot waveguides","description":"Silicon photonic waveguides on a silicon-on-insulator platform that confine light in a narrow slot region.","types":["waveguide"],"aliases":["SOI slot waveguides"],"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/concepts/co_bba85738cab803a57d1ea436d5ad8416"},{"public_id":"co_bfb9b398d65ba056fe779396310d8022","status":"active","name":"high-volume and low-cost production","description":"A manufacturing mode intended to produce large quantities at low per-unit cost.","types":["manufacturing property"],"aliases":[],"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/concepts/co_bfb9b398d65ba056fe779396310d8022"},{"public_id":"co_f109a0cdce07ca8cf44ccd21fcba1d18","status":"active","name":"CMOS-compatible process","description":"A fabrication process compatible with standard complementary metal-oxide-semiconductor manufacturing.","types":["fabrication process"],"aliases":["CMOS-compatible fabrication"],"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/concepts/co_f109a0cdce07ca8cf44ccd21fcba1d18"}],"external_ids":{"DOI":"10.1364/OE.21.019029","ArXiv":null,"PubMed":23938818,"PubMedCentral":null,"MAG":2068268178,"DBLP":null,"ACL":null},"open_access":{"is_open_access":false,"pdf_url":null,"landing_url":"https://sah.borca.ai/papers/33282301","source":null,"pdf_url_source":null,"license":null,"reason":"pdf_url_not_indexed"},"reference_availability":{"status":"available","references_indexed":true,"full_text_available":false,"full_text_source":null,"count_basis":"semantic_scholar_metadata","extraction_status":"not_applicable","reason":null},"source":{"provider":"episteme2","base_corpus":"semantic_scholar_dump","freshness_mode":"unknown","basis":["semantic_scholar_metadata","postgres_metadata"],"limits":["paper metadata is based on indexed upstream scholarly datasets","claims and concepts are available only for extracted papers","absence of claims or concepts means no extracted graph data is available in this response"],"status":"available","degraded":false,"degraded_reasons":[],"diagnostics":{"status":"available","degraded":false,"degraded_reasons":[],"metadata_status":"available","graph_status":"available","abstract_status":"available"},"source_flags":5},"paper_id":631179,"paper_uid":"7abef363-c2b4-42f0-852c-cc08e6153f55","canonical_identity":{"paper_id":631179,"paper_uid":"7abef363-c2b4-42f0-852c-cc08e6153f55","identity_status":"available","lookup_basis":"semantic_scholar_external_id","compatibility_path":"corpus_id"},"url":"https://sah.borca.ai/papers/33282301"}