{"corpus_id":94116754,"paper_sha":"341879e4befdc9a3ea92a320e427a602b39e92b5","doi":"10.1116/1.1601610","arxiv_id":null,"pmid":null,"pmcid":null,"mag_id":1981966175,"dblp_id":null,"acl_id":null,"title":"Microstructural evolution during film growth","year":2003,"publication_date":"2003-09-03","venue":"","journal":{"name":"Journal of Vacuum Science and Technology","pages":"117","volume":"21"},"journal_issn":null,"journal_title":null,"publication_types":["Review"],"pubmed_pub_types":null,"s2_fields_of_study":["Materials Science","Physics"],"reference_count":86,"citation_count":1490,"influential_citation_count":19,"is_open_access":true,"arxiv_categories":null,"arxiv_license":null,"arxiv_journal_ref":null,"mesh_headings":null,"chemicals":null,"comments_corrections":null,"source_flags":1,"s2_open_access_pdf_url":"https://pubs.aip.org/avs/jva/article-pdf/21/5/S117/8187794/s117_1_online.pdf","s2_open_access_landing_url":"https://www.semanticscholar.org/paper/341879e4befdc9a3ea92a320e427a602b39e92b5","s2_open_access_license":null,"s2_open_access_status":"BRONZE","pmc_open_access_pdf_url":null,"pmc_open_access_landing_url":null,"pmc_open_access_license":null,"pmc_open_access_status":null,"unpaywall_open_access_pdf_url":null,"unpaywall_open_access_landing_url":null,"unpaywall_open_access_license":null,"unpaywall_open_access_status":null,"abstract":"Atomic-scale control and manipulation of the microstructure of polycrystalline thin films during kinetically limited low-temperature deposition, crucial for a broad range of industrial applications, has been a leading goal of materials science during the past decades. 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