{"corpus_id":95313419,"paper_sha":"3b52f63c371275299b069ebc5fdf2dfc18175997","doi":"10.1063/1.4866051","arxiv_id":null,"pmid":null,"pmcid":null,"mag_id":2036957528,"dblp_id":null,"acl_id":null,"title":"Focused-ion-beam induced damage in thin films of complex oxide BiFeO3","year":2014,"publication_date":"2014-02-27","venue":"","journal":{"name":"APL Materials","pages":"022109","volume":"2"},"journal_issn":null,"journal_title":null,"publication_types":[],"pubmed_pub_types":null,"s2_fields_of_study":["Chemistry","Materials Science","Physics"],"reference_count":22,"citation_count":14,"influential_citation_count":0,"is_open_access":true,"arxiv_categories":null,"arxiv_license":null,"arxiv_journal_ref":null,"mesh_headings":null,"chemicals":null,"comments_corrections":null,"source_flags":1,"s2_open_access_pdf_url":"https://aip.scitation.org/doi/pdf/10.1063/1.4866051","s2_open_access_landing_url":"https://www.semanticscholar.org/paper/3b52f63c371275299b069ebc5fdf2dfc18175997","s2_open_access_license":"CCBY","s2_open_access_status":"GOLD","pmc_open_access_pdf_url":null,"pmc_open_access_landing_url":null,"pmc_open_access_license":null,"pmc_open_access_status":null,"unpaywall_open_access_pdf_url":null,"unpaywall_open_access_landing_url":null,"unpaywall_open_access_license":null,"unpaywall_open_access_status":null,"abstract":"An unexpected, strong deterioration of crystal quality is observed in epitaxial perovskite BiFeO3 films in which microscale features have been patterned by focused-ion-beam (FIB) milling. Specifically, synchrotron x-ray microdiffraction shows that the damaged region extends to tens of μm, but does not result in measureable changes to morphology or stoichiometry. Therefore, this change would go undetected with standard laboratory equipment, but can significantly influence local material properties and must be taken into account when using a FIB to manufacture nanostructures. The damage is significantly reduced when a thin metallic layer is present on top of the film during the milling process, clearly indicating that the reduced crystallinity is caused by ion beam induced charging.","claims":[{"public_id":"cl_e696fc9cfb58f03c00a74756165251b0","status":"active","text":"A thin metallic top layer during milling significantly reduces the damage, indicating that ion beam induced charging causes the reduced crystallinity.","confidence":0.96,"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/claims/cl_e696fc9cfb58f03c00a74756165251b0"},{"public_id":"cl_251c30f55d597711c18377081d4cb0a2","status":"active","text":"Focused-ion-beam milling causes strong deterioration of crystal quality in epitaxial perovskite BiFeO3 films with microscale patterned features.","confidence":0.98,"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/claims/cl_251c30f55d597711c18377081d4cb0a2"},{"public_id":"cl_09e3a01ed22f255b0d4d89e419103fa4","status":"active","text":"The damage can be missed by standard laboratory equipment but can significantly affect local material properties in FIB-fabricated nanostructures.","confidence":0.9,"contributors":[{"id":1,"public_id":"12632b8b5f","public_label":"Anonymous (12632b8b5f)","roles":["extraction"],"url":"https://sah.borca.ai/u/12632b8b5f"}],"url":"https://sah.borca.ai/claims/cl_09e3a01ed22f255b0d4d89e419103fa4"},{"public_id":"cl_5e260a48d15bf064e16a720dbefc9d02","status":"active","text":"The damaged region extends to tens of μm while producing no measurable changes in morphology or 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