Recent developments in ultra thin oxynitride gate dielectrics

No abstract is available for this paper.

• Publication year

  1995

• Venue

  Microelectronic Engineering

• Publication date

  1995-06-01

• Fields of study

  Materials Science, Physics, Engineering

• Identifiers
  DOI 10.1016/0167-9317(95)00022-Z
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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