Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications

No abstract is available for this paper.

• Publication year

  1998

• Venue

  Materials Science & Engineering R-reports

• Publication date

  1998-05-25

• Fields of study

  Materials Science, Physics, Engineering

• Identifiers
  DOI 10.1016/S0927-796X(97)00023-5
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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