Optical MEMS: From Micromirrors to Complex Systems

O. Solgaard,A. Godil,R. Howe,Luke P. Lee,Y. Peter,H. Zappe

Published 2014 in Journal of microelectromechanical systems

ABSTRACT

No abstract is available for this paper.

PUBLICATION RECORD

Publication year
2014
Venue
Journal of microelectromechanical systems
Publication date
2014-05-16
Fields of study
Materials Science, Physics, Engineering
Identifiers
DOI 10.1109/JMEMS.2014.2319266
External record
Open on Semantic Scholar
Source metadata
Semantic Scholar

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CLAIMS

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CONCEPTS

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