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Strategies of Miniaturised Reference Electrodes Integrated in a Silicon Based “one chip” pH Sensor

A. Simonis,H. Lüth,Joseph Wang,M. Schöning

Published 2003 in Sensors

ABSTRACT

Abstract : Different types of Ag/AgCl reference electrodes have been realised by means of thin- and thick-film technique. For inner electrolyte, KCl-containing membranes have been deposited and different coatings have been used to protect the reference electrode from a fast leaching out of KCl. The stability of the potential of the reference electrodes without KCl-containing membranes in 3 M KCl was about 7 hours for thin-film electrodes and up to 90 hours for thick-film electrodes. The reference electrodes with membrane were stable for more than two months. The thick-film reference electrode was integrated with a thin-film pH sensor onto one chip and the system pH sensor/reference electrode was investigated by means of capacitance/voltage (C/V) and constant capacitance (ConCap) mode. Keywords: reference electrode, thin-film technique, thick-film technique, “one chip” sensor, pH sensor. Introduction The development of miniaturised electrochemical sensors have increased dramatically during the last twenty years [1,2]. The established silicon technology offers the possibility to create a variety of potentiometric sensors for the detection of (bio-)chemical analytes in aqueous solutions. However, one of the serious problems that has restricted their early commercialisation is the missing miniaturised reference electrode, which is an essential component, e.g. in potentiometric measurements. As for the

PUBLICATION RECORD

  • Publication year

    2003

  • Venue

    Sensors

  • Publication date

    2003-09-11

  • Fields of study

    Materials Science, Chemistry, Engineering

  • Identifiers
    DOI 10.3390/S30900330
  • External record

    Open on Semantic Scholar

  • Source metadata

    Semantic Scholar

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