“Playing around” with Field-Effect Sensors on the Basis of EIS Structures, LAPS and ISFETs

Microfabricated semiconductor devices are becoming increasingly relevant, also for the detection of biological and chemical quantities. Especially, the “marriage” of biomolecules and silicon technology often yields successful new sensor concepts. The fabrication techniques of such silicon-based chemical sensors and biosensors, respectively, will have a distinct impact in different fields of application such as medicine, food technology, environment, chemistry and biotechnology as well as information processing. Moreover, scientists and engineers are interested in the analytical benefits of miniaturised and microfabricated sensor devices. This paper gives a survey on different types of semiconductor-based field-effect structures that have been recently developed in our laboratory.

• Publication year

  2005

• Venue

  Italian National Conference on Sensors

• Publication date

  2005-03-01

• Fields of study

  Chemistry, Engineering

• Identifiers
  DOI 10.3390/S5030126PMCID 3930183
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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