Specifics of magnetron sputtering of lithium from liquid-phase target

Abstract The specifics of magnetron sputtering of lithium from a liquid-phase target are discussed. It is noted that sputtering by direct or pulse current was accompanied by rotation of liquid lithium in the target due to magnetohydrodynamic effect, thus favouring a permanent renewal of the target surface. The energy balance of thermal evaporation and magnetron sputtering processes in the overall process of emission of lithium atoms from the liquid-phase target is studied. The energy efficiency of the emission of lithium atoms is estimated. Lithium deposits obtained by magnetron sputtering method on stainless steel substrates have a polycrystalline surface structure. The interphase film formed upon contact of the lithium electrode obtained by magnetron sputtering with electrolyte solutions has lower resistance than the similar film formed on the surface of the electrode made of foil.

• Publication year

  2019

• Venue

  Vacuum

• Publication date

  2019-10-01

• Fields of study

  Materials Science, Physics

• Identifiers
  DOI 10.1016/J.VACUUM.2019.108816
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

• Long lifespan lithium metal anodes enabled by Al2O3 sputter coating

  2018cited by this paper
• Magnetron Discharge with Liquid-Phase Cathode

  2018cited by this paper
• Discharge parameters and plasma characterization in a dc magnetron with liquid Cu target

  2018cited by this paper
• Simulation of heating of the target during high-power impulse magnetron sputtering

  2018cited by this paper
• Efficiently suppressing lithium dendrites on atomic level by ultrafiltration membrane of graphdiyne

  2018cited by this paper
• Li metal coated with amorphous Li 3 PO 4 via magnetron sputtering for stable and long-cycle life lithium metal batteries

  2017cited by this paper
• Conformal Lithium Fluoride Protection Layer on Three-Dimensional Lithium by Nonhazardous Gaseous Reagent Freon.

  2017cited by this paper
• Recent progresses in the suppression method based on the growth mechanism of lithium dendrite

  2017cited by this paper
• Effect of material of the crucible on operation of magnetron sputtering system with liquid-phase target

  2017cited by this paper
• The Effect of 1-Pentylamine as Solid Electrolyte Interphase Precursor on Lithium Metal Anodes

  2017cited by this paper
• Energy and substance transfer in magnetron sputtering systems with liquid-phase target

  2016cited by this paper
• Magnetron deposition of coatings with evaporation of the target

  2015cited by this paper
• An ex-situ nitridation route to synthesize Li3N-modified Li anodes for lithium secondary batteries

  2015cited by this paper
• Plasma properties during magnetron sputtering of lithium phosphorous oxynitride thin films

  2015cited by this paper
• A Review of Solid Electrolyte Interphases on Lithium Metal Anode

  2015cited by this paper
• A lithium anode protection guided highly-stable lithium-sulfur battery.

  2014cited by this paper
• Magnetron sputtering amorphous carbon coatings on metallic lithium: Towards promising anodes for lithium secondary batteries

  2014cited by this paper
• Stable lithium electrodeposition in liquid and nanoporous solid electrolytes.

  2014cited by this paper
• Energy Transferred From a Hot Nickel Target During Magnetron Sputtering

  2014cited by this paper
• Effects of current densities on the lithium plating morphology at a lithium phosphorus oxynitride glass electrolyte/copper thin film interface

  2013cited by this paper
• Electrochemical behaviors of a Li3N modified Li metal electrode in secondary lithium batteries

  2011cited by this paper
• On surface temperatures during high power pulsed magnetron sputtering using a hot target

  2011cited by this paper
• Magnetron sputtering – Milestones of 30 years

  2010cited by this paper
• Analyses of Thick Lithium Coatings Deposited by Sputter‐Evaporation and Exposed to Air

  2009cited by this paper
• Pulsed-DC selfsputtering of copper

  2008cited by this paper
• RNRA and neutron threshold analyses of thick lithium coatings deposited by sputter evaporation

  2008cited by this paper
• Understanding the discharge voltage behavior during reactive sputtering of oxides

  2007cited by this paper
• Lithium metal stripping/plating mechanisms studies: A metallurgical approach

  2006cited by this paper
• Lithium phosphorous oxynitride as a passive layer for anodes in lithium secondary batteries

  2004cited by this paper
• Observation of dendritic growth on Li powder anode using optical cell

  2004cited by this paper
• Suppressive effect of lithium phosphorous oxynitride at carbon anode on solvent decomposition in liquid electrolyte

  2002cited by this paper
• An Introduction to Magnetohydrodynamics

  2001cited by this paper
• Ionic processes in solid-electrolyte passivating films on lithium

  2000cited by this paper
• Magnetic Reconnection: MHD Theory and Applications

  2000cited by this paper
• Magnetron sputtering: a review of recent developments and applications

  2000cited by this paper
• Using pulsed direct current power for reactive sputtering of Al2O3

  1999cited by this paper
• High-rate deposition of SiO2 by modulated DC reactive sputtering in the transition mode without a feedback system

  1996cited by this paper
• Low pressure magnetron sputtering and selfsputtering discharges

  1996cited by this paper
• The sei model—application to lithium-polymer electrolyte batteries

  1995cited by this paper
• Mechanisms and theory of physical sputtering by particle impact

  1987cited by this paper
• Chemical and Morphological Characteristics of Lithium Electrode Surfaces

  1981cited by this paper
• Surface reactions of lithium with the environment

  1981cited by this paper
• Lithium literature review: lithium's properties and interactions

  1978cited by this paper
• Effect of temperature on the sputtering yield of copper

  1976cited by this paper
• Compilation of the Static Dielectric Constant of Inorganic Solids

  1973cited by this paper
• Grain size measurement by the intercept method

  1971cited by this paper

• Potentials of Magnetron Sputtering for Battery Applications—A Case Study for Thin Lithium Metal Anodes

  2026cites this paper
• Design and Fabrication of a Low-Activation Lithium Target for BNCT

  2026cites this paper
• Fabrication of Ultra-thin Lithium Foil and Application in Pre-lithiation

  2025cites this paper
• Review of Thin Lithium Metal Battery Anode Fabrication – Microstructure – Electrochemistry Relations

  2025cites this paper
• Recent advances in robust and ultra‐thin Li metal anode

  2024cites this paper
• Current Status and Future Perspective on Lithium Metal Anode Production Methods

  2023cites this paper
• On the interaction of lithium nitride with lithium metal

  2022cites this paper
• High entropy alloy synthesis, characterisation, manufacturing & potential applications: a review

  2021cites this paper