Mechanisms and theory of physical sputtering by particle impact

No abstract is available for this paper.

• Publication year

  1987

• Venue

  Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms

• Publication date

  1987-06-02

• Fields of study

  Materials Science, Physics, Chemistry

• Identifiers
  DOI 10.1016/0168-583X(87)90004-8
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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