Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates.

This paper demonstrates transfer of optical devices without extra un-patterned silicon onto low-cost, flexible plastic substrates using single-crystal silicon nanomembranes. Employing this transfer technique, stacking two layers of silicon nanomembranes with photonic crystal waveguide in the first layer and multi mode interference couplers in the second layer is shown, respectively. This technique is promising to realize high density integration of multilayer hybrid structures on flexible substrates.

• Publication year

  2010

• Venue

  Optics Express

• Publication date

  2010-09-13

• Fields of study

  Medicine, Materials Science, Physics, Engineering

• Identifiers
  DOI 10.1364/OE.18.020086PMID 20940898
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar, PubMed

• No claims are published for this paper.

• No concepts are published for this paper.

• Nanomembrane enabled nanophotonic devices

  2010cited by this paper
• Output Formulation for Symmetrically Excited One-to-$N$ Multimode Interference Coupler

  2010cited by this paper
• Semiconductors turn soft: inorganic nanomembranes

  2010cited by this paper
• High efficiency diffractive grating coupler based on transferred silicon nanomembrane overlay on photonic waveguide

  2009cited by this paper
• Flexible photodetectors on plastic substrates by use of printing transferred single-crystal germanium membranes

  2009cited by this paper
• Group IV crystalline nanomembranes: Materials, technology, and potential applications

  2009cited by this paper
• Flexible microwave PIN diodes and switches employing transferrable single-crystal Si nanomembranes on plastic substrates

  2009cited by this paper
• Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes

  2009cited by this paper
• Stretchable Electronics: Materials Strategies and Devices

  2008cited by this paper
• Slow light in photonic crystals

  2008cited by this paper
• 7.8-GHz flexible thin-film transistors on a low-temperature plastic substrate

  2007cited by this paper
• Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides

  2007cited by this paper
• Efficient coupling into slow-light photonic crystal channel guides using photonic crystal tapers.

  2007cited by this paper
• All-optical switching, bistability, and slow-light transmission in photonic crystal waveguide-resonator structures.

  2006cited by this paper
• High-speed strained-single-crystal-silicon thin-film transistors on flexible polymers

  2006cited by this paper
• Bendable single crystal silicon thin film transistors formed by printing on plastic substrates

  2005cited by this paper
• Dislocation-free strained silicon-on-silicon by in-place bonding

  2005cited by this paper
• Analysis of butt coupling in photonic Crystals

  2004cited by this paper
• Wafer-level membrane transfer bonding of polycrystalline silicon bolometers for use in infrared focal plane arrays

  2001cited by this paper
• A new design approach to large input/output number multimode interference couplers and its application to low-crosstalk WDM routers

  1998cited by this paper
• Resolution of self-images in planar optical waveguides*

  1978cited by this paper

• Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit

  2024cites this paper
• Flexible and Stretchable Photonics: The Next Stretch of Opportunities

  2020cites this paper
• When finite-size effects dictate the growth dynamics on strained freestanding nanomembranes

  2020cites this paper
• A 3D photonic sensor integrated tissue model for strain sensing

  2019cites this paper
• Recent Advances in Tactile Sensing Technology

  2018cites this paper
• Flexible Transient Optical Waveguides and Surface‐Wave Biosensors Constructed from Monocrystalline Silicon

  2018cites this paper
• Proposal and numerical study of a flexible visible photonic crystal defect cavity for nanoscale strain sensors.

  2017cites this paper
• A new twist on glass: A brittle material enabling flexible integrated photonics

  2017cites this paper
• Materials and devices for mechanically flexible integrated photonics

  2016cites this paper
• Titanium Dioxide Based Microtubular Cavities for On-Chip Integration

  2016influential citation
• Luminescent nanoparticles embedded in TiO2 microtube cavities for the activation of whispering-gallery-modes extending from the visible to the near infrared.

  2016cites this paper
• Configurable Compliant Substrates for SiGe Nanomembrane Fabrication

  2015cites this paper
• Heterogeneously integrated MIR silicon photonics

  2014cites this paper
• Integrated silicon and silicon nitride photonic circuits on flexible substrates.

  2014cites this paper
• Heterogeneously integrated silicon photonics for the mid-infrared and spectroscopic sensing.

  2014cites this paper
• Integrated crystalline silicon and silicon nitride photonic devices on plastic substrates

  2014cites this paper
• Thin Film Receiver Materials for Deterministic Assembly by Transfer Printing

  2014cites this paper
• High quality silicon photonic devices based on heterogeneous integration method

  2014cites this paper
• Progress in 2D photonic crystal Fano resonance photonics

  2014cites this paper
• Large area transferred silicon nanomembrane photonic devices on unconventional substrates

  2013cites this paper
• Flexible integrated photonics: where materials, mechanics and optics meet [Invited]

  2013cites this paper
• Thinning and Shaping Solid Films into Functional and Integrative Nanomembranes

  2012cites this paper
• Stamp printing of silicon-nanomembrane-based photonic devices onto flexible substrates with a suspended configuration.

  2012cites this paper
• Flexible and tunable silicon photonic devices

  2012cites this paper
• Silicon nanomembranes for high-performance flexible photonic interconnects and devices

  2012cites this paper
• Mécanismes de collage et de transfert de films monocristallins dans des structures à couches de polymères

  2012cites this paper
• Arrays of silicon micro/nanostructures formed in suspended configurations for deterministic assembly using flat and roller-type stamps.

  2011cites this paper
• Nanomembrane transfer process for intricate photonic device applications.

  2011cites this paper
• MIT Open Access Articles A new twist on glass: A brittle material enabling flexible integrated photonics

  year unknowncites this paper