Low loss etchless silicon photonic waveguides

We demonstrate low loss silicon waveguides fabricated without silicon etching by selective oxidation. We show propagation losses of 0.3dB/cm (lambda=1.55 mum), roughness of 0.3 nm RMS, and 0.0002 dB loss for a 90deg bend with 20 mum bending radius.

• Publication year

  2009

• Venue

  2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum electronics and Laser Science Conference

• Publication date

  2009-03-16

• Fields of study

  Materials Science, Physics, Medicine, Engineering

• Identifiers
  DOI 10.1364/CLEO.2009.CTHU6PMID 19293905
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar, PubMed

• No claims are published for this paper.

• No concepts are published for this paper.

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