High-speed, sub-15 nm feature size thermochemical nanolithography.

No abstract is available for this paper.

• Publication year

  2007

• Venue

  Nano letters (Print)

• Publication date

  2007-03-08

• Fields of study

  Medicine, Materials Science, Chemistry, Engineering

• Identifiers
  DOI 10.1021/NL070300FPMID 17385937
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar, PubMed

• No claims are published for this paper.

• No concepts are published for this paper.

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