An Automatic Wafer Inspection System Using Pipelined Image Processing Techniques

H. Yoda,Y. Ohuchi,Yuzo Taniguchi,M. Ejiri

Published 1988 in IEEE Transactions on Pattern Analysis and Machine Intelligence

ABSTRACT

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PUBLICATION RECORD

  • Publication year

    1988

  • Venue

    IEEE Transactions on Pattern Analysis and Machine Intelligence

  • Publication date

    Unknown publication date

  • Fields of study

    Computer Science, Engineering

  • Identifiers
  • External record

    Open on Semantic Scholar

  • Source metadata

    Semantic Scholar

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