A Large Piston Displacement MEMS Mirror With Electrothermal Ladder Actuator Arrays for Ultra-Low Tilt Applications

No abstract is available for this paper.

• Publication year

  2014

• Venue

  Journal of microelectromechanical systems

• Publication date

  2014-02-01

• Fields of study

  Materials Science, Physics, Engineering

• Identifiers
  DOI 10.1109/JMEMS.2013.2290994
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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