Modeling and Control of a Large-Stroke Electrothermal MEMS Mirror for Fourier Transform Microspectrometers

No abstract is available for this paper.

• Publication year

  2016

• Venue

  Journal of microelectromechanical systems

• Publication date

  2016-05-24

• Fields of study

  Physics, Engineering

• Identifiers
  DOI 10.1109/JMEMS.2016.2565388
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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