Precision, accuracy, and uncertainty in quantitative surface analyses by Auger‐electron spectroscopy and x‐ray photoelectron spectroscopy

C. Powell,M. Seah

Published 1990 in Journal of Vacuum Science and Technology

ABSTRACT

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PUBLICATION RECORD

  • Publication year

    1990

  • Venue

    Journal of Vacuum Science and Technology

  • Publication date

    1990-03-01

  • Fields of study

    Materials Science, Chemistry

  • Identifiers
  • External record

    Open on Semantic Scholar

  • Source metadata

    Semantic Scholar

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