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Molecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Ethylene Glycol
A. Dameron,D. Seghete,B. B. Burton,Stephen D. Davidson,A. Cavanagh,J. A. Bertrand,S. George
Published 2008 in Chemistry of Materials
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- Publication year
2008
- Venue
Chemistry of Materials
- Publication date
2008-04-29
- Fields of study
Materials Science
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