Bosch deep silicon etching: improving uniformity and etch rate for advanced MEMS applications

No abstract is available for this paper.

• Publication year

  1999

• Venue

  Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291)

• Publication date

  Unknown publication date

• Fields of study

  Materials Science, Physics, Engineering

• Identifiers
  DOI 10.1109/MEMSYS.1999.746812
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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