H2-TPD study on the difference in the growth kinetics between SiH4- and Si2H6-GSMBE

No abstract is available for this paper.

• Publication year

  1996

• Venue

  Surface Science

• Publication date

  1996-06-20

• Fields of study

  Chemistry, Materials Science, Physics, Engineering

• Identifiers
  DOI 10.1016/0039-6028(96)00222-1
• External record

  Open on Semantic Scholar

• Source metadata

  Semantic Scholar

• No claims are published for this paper.

• No concepts are published for this paper.

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